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China Semiconductor Equipment Market (2026-2036)

The China Semiconductor Equipment Market was valued at USD 49.31 billion in 2025. This market is expected to reach USD 71.22 billion by 2036 from an estimated USD 45.86 billion in 2026, registering a CAGR of 4.5% during the forecast period (2026-2036).

Published
Oct 2026
Pages
242
Format
PDF + Excel
Report ID
MR-2269
Base year
2025
Market size · USD billion · 2024–2036Forecast 2026–2036 · 4.5% CAGR
2024 · HISTORICAL
$49.55B
2036
$71.22B
CAGR 2026–2036
4.5%
$100B$75B$50B$25B0
2024
2025
'26
'27
'28
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'36

2024–2025 baseline · 2026–2036 forecast at 4.5% CAGR · hover a bar for the value

Key highlights

01

The China Semiconductor Equipment Market is projected to reach USD 71.22 billion by 2036, driven by self-sufficiency policy, mature-node and memory capacity expansion, and advanced packaging.

02

China remained the world's largest market for semiconductor equipment. According to SEMI, equipment billings in China were USD 49.31 billion in 2025, essentially unchanged from a record USD 49.55 billion in 2024, and accounted for about 36.5% of global billings of USD 135.1 billion.

03

By equipment type, Deposition Equipment is expected to account for the largest market share, whereas Assembly & Packaging Equipment is projected to witness the fastest growth through 2036.

04

Foreign suppliers expect lower China sales. ASML reported that China accounted for 33% of its net system sales in 2025 and 36% in the fourth quarter, above its earlier forecast of about 25%, and expects China to account for about 20% of its sales in 2026, stating that China customer demand would decline significantly compared with 2024 and 2025.

05

Export controls continue to tighten. The U.S. expanded controls on semiconductor equipment in October 2022, October 2023, and December 2024, the Netherlands extended licensing requirements to additional ASML immersion lithography systems from September 2024, and Japan added 23 semiconductor equipment items to its export controls in July 2023.

06

By region, the Yangtze River Delta is expected to account for the largest market share in 2026, while Central China is projected to register the fastest growth during the forecast period.

Report summary

ParticularsDetails
Forecast Period2026-2036
Base Year2025
Estimated Year2026
CAGR (Value)4.5%
FormatPDF, Excel & Cloud Portal · 242 pages
Market Size (Value) in 2026USD 45.86 Billion
Market Size (Value) in 2036USD 71.22 Billion
Segments CoveredBy Equipment Type: Lithography, Etch, Deposition, Cleaning, CMP, Ion Implantation, Thermal Processing, Metrology & Inspection, Test, Assembly & Packaging, Fab Facilities & Others. · By Supplier Origin: Domestic Suppliers, Foreign Suppliers. By Application: Foundry & Logic, Memory, Power & Compound Semiconductors, Analog & Specialty, Advanced Packaging. · By Technology Node: Mature Nodes (28 nm and Above), Advanced Nodes (Below 28 nm). By Wafer Size: 300 mm, 200 mm & Below. · By End User: Foundries, Memory Manufacturers, Integrated Device Manufacturers, OSAT Providers.
Regions CoveredYangtze River Delta (Shanghai, Jiangsu, Zhejiang, Anhui), Beijing-Tianjin-Hebei Region (Beijing, Tianjin, Hebei), Pearl River Delta (Guangdong), Central China (Hubei, Hunan, Henan), Western China (Sichuan, Chongqing, Shaanxi), Northeast China & Other Regions (Liaoning and Others).
Key CompaniesApplied Materials, Lam Research, KLA, ASML, Tokyo Electron, SCREEN, Hitachi High-Tech, Advantest, Teradyne, Kokusai Electric, NAURA, AMEC, ACM Research, Piotech, Kingsemi, Hwatsing, Shanghai Micro Electronics Equipment, and Hangzhou Changchuan Technology.

Report overview

Market size trajectory
2024
USD 49.55 billion
2026
USD 45.86 billion
2036
USD 71.22 billion
~1.6× expansion 2026–2036 at 4.5% CAGR
Scope note

Segments covered: equipment type, supplier origin, technology node, end user, application, wafer size.

The growth of this market is mainly driven by national policy and state funding for semiconductor self-sufficiency, continued expansion of mature-node, specialty, and memory capacity, and rising investment in advanced packaging and test. However, foreign export controls on advanced equipment, the risk of a spending correction after record stockpiling in 2024 and 2025, technology gaps in domestic equipment, and supply chain dependence on foreign components and materials restrain the growth of this market.

Furthermore, the localization of equipment by domestic manufacturers, the development of domestic lithography, and demand for power and compound semiconductor equipment are expected to offer growth opportunities for the stakeholders in this market. However, localizing critical subsystems and components, servicing and maintaining the installed base of foreign tools under export restrictions, qualifying domestic tools in high-volume production, and developing a skilled workforce remain major challenges impacting the growth of this market. Additionally, the rapid rise of domestic equipment suppliers, the concentration of investment in mature and specialty nodes, growth in advanced packaging and chiplet integration, and capital market support for domestic toolmakers are prominent trends in this market.

The China Semiconductor Equipment Market comprises the equipment used to manufacture, assemble, and test semiconductor devices in mainland China, including front-end wafer fabrication equipment such as lithography, etch, deposition, cleaning, chemical mechanical planarization (CMP), ion implantation, thermal processing, and metrology and inspection systems; back-end test, assembly, and packaging equipment, including advanced packaging tools; and fab facilities and related equipment. The market includes equipment supplied by both domestic Chinese manufacturers and foreign suppliers from the U.S., Japan, the Netherlands and other European countries, and South Korea, measured by billings to fabs located in mainland China. Customers include domestic and foreign-owned foundries, memory manufacturers, integrated device manufacturers, power and compound semiconductor producers, and outsourced semiconductor assembly and test (OSAT) providers. Taiwan is excluded.

China has been the world's largest market for semiconductor equipment for several years. SEMI reported that equipment billings in China reached a record USD 49.55 billion in 2024 and remained at USD 49.31 billion in 2025, about 36.5% of global billings of USD 135.1 billion, even as SEMI had forecast in 2025 that Chinese spending would fall by 24%. The strength reflected aggressive capacity expansion by Chinese chipmakers in mature nodes, memory, and specialty processes, and purchases of equipment ahead of expected further export restrictions. ASML reported that China accounted for 33% of its net system sales in 2025, and 36% in the fourth quarter, well above the approximately 25% share it had forecast in July 2025.

The market is shaped by an escalating series of export controls. The U.S. introduced sweeping controls on advanced semiconductor equipment and technology in October 2022, expanded them in October 2023, and in December 2024 added about 140 Chinese entities to the Entity List and controls on additional types of equipment and high-bandwidth memory. In September 2025, the U.S. Commerce Department extended Entity List restrictions to affiliates at least 50% owned by listed companies. The Netherlands requires export licenses for ASML's most advanced immersion lithography systems, extended from September 2024 to the NXT:1970i and NXT:1980i, and Japan added 23 semiconductor manufacturing equipment items to its export controls in July 2023. ASML has never shipped extreme ultraviolet (EUV) lithography systems to China, and expects China to fall to about 20% of its sales in 2026.

China has responded with large-scale investment in self-sufficiency. The third phase of the National Integrated Circuit Industry Investment Fund, known as Big Fund III, was established in May 2024 with registered capital of RMB 344 billion, the largest of the three phases, and local governments have launched additional funds. Domestic equipment makers, including NAURA Technology, Advanced Micro-Fabrication Equipment (AMEC), ACM Research, Piotech, and Hwatsing, have grown rapidly as Chinese fabs prioritize local tools, while domestic lithography developers such as Shanghai Micro Electronics Equipment (SMEE) and newer entrants seek to close the most significant technology gap. China has also used its own export controls, banning exports of gallium, germanium, and antimony to the U.S. in December 2024, before suspending the ban in November 2025 until 27 November 2026.

Market dynamics

18 factors across 5 forces
01

National Policy and State Funding for Self-Sufficiency

National policy and state funding for semiconductor self-sufficiency are a major factor driving the China Semiconductor Equipment Market. China has made semiconductors a strategic priority in successive national plans, and in May 2024 established the third phase of the National Integrated Circuit Industry Investment Fund with registered capital of RMB 344 billion, larger than the first two phases, with a focus on equipment, materials, and advanced manufacturing. Provincial and municipal governments, including those of Shanghai, Beijing, Shenzhen, and Hubei, have launched their own semiconductor funds and incentives. Export controls by the U.S., the Netherlands, and Japan have reinforced the policy imperative to build domestic capacity and supply chains, and Chinese chipmakers have accelerated investment in new fabs and domestic tools to reduce exposure to foreign restrictions. This sustained state support underpinned equipment billings of USD 49.55 billion in 2024 and USD 49.31 billion in 2025, according to SEMI, making China the world's largest equipment market in both years.

02

Expansion of Mature-Node, Specialty, and Memory Capacity

The continued expansion of mature-node, specialty, and memory capacity is significantly supporting equipment demand. Chinese foundries and integrated device manufacturers are adding capacity at 28-nanometer and above nodes for automotive, industrial, consumer, and power semiconductors, which are less affected by export controls on advanced equipment, while domestic memory makers such as ChangXin Memory Technologies and Yangtze Memory Technologies continue to invest in DRAM and 3D NAND production. SEMI reported that China accounted for about 36.5% of global equipment billings in 2025, with China, Taiwan, and South Korea together representing 79%. ASML reported that China accounted for 33% of its net system sales in 2025, reflecting substantial purchases of deep ultraviolet lithography systems for mature and specialty processes. This capacity build-out is expected to continue as China seeks to supply a larger share of its domestic chip demand, which remains heavily dependent on imports.

03

Rising Investment in Advanced Packaging and Test

Rising investment in advanced packaging and test is expanding the back-end equipment market in China. With access to the most advanced front-end processes restricted, Chinese companies are using advanced packaging, chiplet integration, and heterogeneous integration to improve system performance, and China is home to several of the world's largest OSAT companies, including JCET Group, Tongfu Microelectronics, and Tianshui Huatian Technology. Globally, SEMI reported that semiconductor test equipment billings grew 55% in 2025 and assembly and packaging equipment grew 21%, driven by AI and high-bandwidth memory. The December 2024 U.S. controls on high-bandwidth memory have increased the incentive for Chinese memory makers and packagers to develop domestic HBM and advanced packaging capabilities, supporting demand for bonding, wafer-level packaging, and test equipment.

Table of contents

14 chapters · 165 sections · 242 pages · click to expand
Review the full research scope before you buy. Chapters can also be purchased individually.

1.1Market Definition
1.2Market Ecosystem
1.3Currency and Limitations
1.3.1Currency
1.3.2Limitations
1.4Key Stakeholders

Segmental analysis

SegmentLargest share (2026)Fastest growth (2026–2036)
By Equipment TypeDeposition EquipmentAssembly & Packaging Equipment
By Supplier Origin—Rapid growth of this
By ApplicationFoundry & LogicPower & Compound Semiconductors
By Technology Node—Rapid growth of this
By Wafer Size—Rapid growth of this
By End UserFoundriesOSAT Providers
01

By Equipment Type

  • The Deposition Equipment segment is expected to account for the largest share of the market.
  • The large share of this segment is mainly due to the large number of deposition steps in logic, memory, and specialty processes and strong adoption of domestic deposition tools.
  • However, the Assembly & Packaging Equipment segment is projected to register the highest CAGR during the forecast period.
  • The rapid growth of this segment is attributed to rising investment in advanced packaging, chiplet integration, and domestic HBM capability.
CoversLithographyEtchDepositionCleaningCMPIon ImplantationThermal ProcessingMetrology & InspectionTestAssembly & PackagingFab Facilities & Others.
02

By Supplier Origin

  • The Foreign Suppliers segment is expected to account for the larger share of the market.
  • The large share of this segment is mainly due to the continued dependence on foreign lithography, metrology, and advanced process tools, as reflected in China accounting for 33% of ASML's 2025 net system sales.
  • However, the Domestic Suppliers segment is projected to register the higher CAGR during the forecast period.
  • The rapid growth of this segment is attributed to export controls, state funding, and chipmakers' prioritization of local tools.
CoversDomestic SuppliersForeign Suppliers. By Application: Foundry & LogicMemoryPower & Compound SemiconductorsAnalog & SpecialtyAdvanced Packaging.
03

By Application

  • The Foundry & Logic segment is expected to account for the largest share of the market.
  • The large share of this segment is mainly due to extensive mature-node foundry capacity expansion.
  • However, the Power & Compound Semiconductors segment is projected to register the highest CAGR during the forecast period.
  • The rapid growth of this segment is attributed to demand for silicon carbide and gallium nitride devices from electric vehicles, renewable energy, and industrial applications.
CoversFoundry & LogicMemoryPower & Compound Semiconductors
04

By Technology Node

  • The Mature Nodes segment is expected to account for the larger share of the market.
  • The large share of this segment is mainly due to the concentration of Chinese capacity expansion at 28 nanometers and above, where equipment access is less restricted.
  • However, the Advanced Nodes segment is projected to register the higher CAGR during the forecast period.
  • The rapid growth of this segment is attributed to national priority on advanced logic and memory and the maturation of domestic tools for advanced processes.
CoversMature NodesAdvanced Nodes (Below 28 nm). By Wafer Size: 300 mm200 mm & Below.
05

By Wafer Size

  • The 300-Millimeter segment is expected to account for the larger share of the market.
  • The large share of this segment is mainly due to the use of 300-millimeter wafers in most new logic and memory fabs.
  • However, the 200-Millimeter & Below segment is projected to register the higher CAGR during the forecast period.
  • The rapid growth of this segment is attributed to the expansion of silicon carbide, gallium nitride, and specialty analog capacity and the transition of silicon carbide production to 200-millimeter wafers.
06

By End User

  • The Foundries segment is expected to account for the largest share of the market.
  • The large share of this segment is mainly due to large-scale capacity expansion by Chinese foundries.
  • However, the OSAT Providers segment is projected to register the highest CAGR during the forecast period.
  • The rapid growth of this segment is attributed to growing investment in advanced packaging and test.
CoversFoundriesMemory ManufacturersIntegrated Device ManufacturersOSAT Providers.

Competitive landscape

The China Semiconductor Equipment Market is served by leading global equipment suppliers from the U.S., Japan, the Netherlands, and South Korea, and by a rapidly growing group of domestic Chinese manufacturers. Foreign suppliers continue to lead in lithography, metrology and inspection, and many advanced process tools, while domestic suppliers are gaining share in etch, deposition, cleaning, CMP, thermal processing, and coating and developing, particularly for mature nodes. Competition centers on technology performance, export control compliance and licensing, reliability and uptime, service capability, price, and security of supply.

Foreign suppliers are managing export restrictions and shifting sales toward permitted products and customers, while domestic suppliers are expanding product portfolios, investing in research and development, and deepening partnerships with Chinese chipmakers, supported by state funding and capital markets.

The report provides a comprehensive competitive assessment of the leading companies operating in the China Semiconductor Equipment Market. The key players profiled in the report include Applied Materials, Inc. (U.S.), Lam Research Corporation (U.S.), KLA Corporation (U.S.), ASML Holding N.V. (Netherlands), Tokyo Electron Limited (Japan), SCREEN Holdings Co., Ltd. (Japan), Hitachi High-Tech Corporation (Japan), Advantest Corporation (Japan), Teradyne, Inc. (U.S.), Kokusai Electric Corporation (Japan), NAURA Technology Group Co., Ltd. (China), Advanced Micro-Fabrication Equipment Inc. China (AMEC) (China), ACM Research, Inc. (China/U.S.), Piotech Inc. (China), Kingsemi Co., Ltd. (China), Hwatsing Technology Co., Ltd. (China), Shanghai Micro Electronics Equipment (Group) Co., Ltd. (China), and Hangzhou Changchuan Technology Co., Ltd. (China).

Companies profiled (18)
  • Applied Materials
  • Lam Research
  • KLA
  • ASML
  • Tokyo Electron
  • SCREEN
  • Hitachi High-Tech
  • Advantest
  • Teradyne
  • Kokusai Electric
  • NAURA
  • AMEC
  • ACM Research
  • Piotech
  • Kingsemi
  • Hwatsing
  • Shanghai Micro Electronics Equipment
  • Hangzhou Changchuan Technology

Expert perspectives

China remains the world's largest semiconductor equipment market, with billings of USD 49.31 billion in 2025, but it is entering a new phase. Record purchases in 2024 and 2025, driven partly by stockpiling ahead of export controls, are expected to give way to slower spending, as ASML's guidance for its China share to fall from 33% to about 20% indicates, while the composition of the market shifts steadily toward domestic suppliers.

Three structural changes are expected to shape the market through 2036. First, domestic equipment suppliers will capture a growing share of Chinese spending, starting with mature-node etch, deposition, cleaning, and CMP, and moving into more advanced processes and components over time. Second, investment will remain concentrated in mature and specialty nodes, power and compound semiconductors, memory, and advanced packaging, where export controls are less binding. Third, lithography will remain the decisive bottleneck, and progress by domestic lithography developers will determine the pace of China's advancement at leading-edge nodes.

For companies planning entry or expansion, the most attractive positions over the forecast period are likely to be found in domestic etch, deposition, and cleaning tools, precision components and subsystems, advanced packaging and test equipment, silicon carbide and gallium nitride equipment, and third-party service for the installed base. The principal risks are further export controls, a post-stockpiling correction, technology gaps, and component supply disruptions.

Customer perspectives

Insights gathered during primary interviews with fab executives, equipment procurement managers, and domestic equipment suppliers highlight where purchasing priorities are shifting. The following perspectives reflect recurring themes raised across these discussions.

Customer perspective
“This reflects the prioritization of domestic tools and the persistence of lithography and metrology gaps.”
Vice President of Operations · Chinese Foundry
Customer perspective
“This indicates the importance of installed-base support and the digestion of stockpiled equipment.”
Procurement Director · Chinese Memory Manufacturer
Customer perspective
“This points to component localization as a key constraint on domestic equipment growth.”
General Manager · Domestic Equipment Supplier

Frequently asked questions

The China Semiconductor Equipment Market is estimated at USD 45.86 billion in 2026, following billings of USD 49.31 billion in 2025 according to SEMI.
 

Cite this report

Meticulous Research. (2026). China Semiconductor Equipment Market - Opportunity Analysis and Industry Forecast (2026-2036) (Report No. MR-2269). Meticulous Market Research Pvt. Ltd. https://www.meticulousresearch.com/product/china-semiconductor-equipment-market-6952

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